Title:
多元系物質薄膜の特性検査方法
Document Type and Number:
Japanese Patent JP4080810
Kind Code:
B2
More Like This:
Inventors:
Atsushi Yamamoto
Takashi Kusano
Isao Okutomi
Takashi Kusano
Isao Okutomi
Application Number:
JP2002230247A
Publication Date:
April 23, 2008
Filing Date:
August 07, 2002
Export Citation:
Assignee:
Toshiba Corporation
Shibafu Engineering Co., Ltd.
Shibafu Engineering Co., Ltd.
International Classes:
C23C14/24; G01N23/207; C23C14/04; C23C14/56; G01N23/225; G01N25/04; G01N25/18
Domestic Patent References:
| JP2001272342A | ||||
| JP2001329366A | ||||
| JP43027926B1 | ||||
| JP2004010962A | ||||
| JP49034573B1 | ||||
| JP48081782A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu