Title:
CHARGE CARRIER GENERATION SOURCE
Document Type and Number:
Japanese Patent JP2023001063
Kind Code:
A
Abstract:
To provide a charge carrier generation source that reduces or avoids changes over time.SOLUTION: A charge carrier generation source 100 includes a carrier generation region 120 configured to provide charge carriers, and a grid electrode 106, and the grid electrode includes a conductive carrier, the carrier has a first side and a second side opposite the first side, the first side directly adjacent to a carrier generation region, the carrier has a plurality of through-holes 116 extending from a first side through the carrier to a second side, each of the plurality of through-holes has a first opening surface on the first side and each of the plurality of through-holes has a second opening surface on the second side, and the first opening surface is larger than the second opening surface.SELECTED DRAWING: Figure 2A
Inventors:
ENRICO LOOS
MATTHIAS NESTLER
MATTHIAS NESTLER
Application Number:
JP2022094238A
Publication Date:
January 04, 2023
Filing Date:
June 10, 2022
Export Citation:
Assignee:
SCIA SYSTEMS GMBH
International Classes:
H01J27/08; H01J37/08
Attorney, Agent or Firm:
Tatsuo Egami
Hiroshi Miwa
Hiroshi Miwa
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