Title:
Charged particle beam device
Document Type and Number:
Japanese Patent JP6239401
Kind Code:
B2
Abstract:
A charged particle beam apparatus includes: a charged particle beam column; a detector configured to detect secondary charged particles; an image processor; a display device; a needle arranged in an irradiation area of charged particle beam; a needle actuator; a user interface; and a controller configured to control the needle actuator to actuate the needle in accordance with a target position that is set by the user interface. The controller controls the needle actuator to move the needle to track a change of the target position that is set by the user interface.
Inventors:
Atsushi Uemoto
Tatsuya Asahata
Hidekazu Suzuki
Hiroshi Yamamoto
Tatsuya Asahata
Hidekazu Suzuki
Hiroshi Yamamoto
Application Number:
JP2014024421A
Publication Date:
November 29, 2017
Filing Date:
February 12, 2014
Export Citation:
Assignee:
Hitachi High-Tech Science Co., Ltd.
International Classes:
H01J37/28; H01L21/66
Domestic Patent References:
| JP2000147070A | ||||
| JP2001147124A |
Foreign References:
| US20080203299 |
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Nishizawa Kazumi
Shingo Suzuki
Nishizawa Kazumi