Title:
Charged particle beam irradiation equipment and a charged particle beam irradiation method
Document Type and Number:
Japanese Patent JP6210493
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide charged particle beam irradiation device and method that can shorten the time required for sample processing and observation.SOLUTION: A controller 20 controls an irradiation unit for irradiating an electron beam B1 so that the irradiation current amount of the electron beam B1 to be applied to a processing target area is larger than the irradiation current amount of the electron beam B1 to be applied to a non-processing area, and a pulse having a predetermined pulse duty ratio is output. A detection signal amplifier 18 sets the gain of a detection signal during an irradiation time of the charged particle beam to the processing target area to be lower than the gain of a detection signal during an irradiation time of the electron beam B1 to the non-processing area, and amplifies the detection signal. An image constructing unit 30 constructs an observation image for observing the state of a powder sample 13 by using the amplified detection signal.
Inventors:
Kunihiko Uchida
Yukihiro Tanaka
Yukihiro Tanaka
Application Number:
JP2014051029A
Publication Date:
October 11, 2017
Filing Date:
March 14, 2014
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/30; H01J37/244
Domestic Patent References:
| JP10321180A | ||||
| JP7302574A | ||||
| JP2015168228A |
Attorney, Agent or Firm:
Shinto International Patent Office
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