Title:
荷電粒子検出器およびその制御方法
Document Type and Number:
Japanese Patent JP6462526
Kind Code:
B2
Abstract:
The present embodiment relates to a charged-particle detector, etc. provided with a structure for effectively suppressing ion feedbacks under a low-vacuum environment. In order to capture the residual-gas ions, which are generated by collisions between the electrons output from a MCP unit 200 and residual-gas molecules, by a second electrode 400, which is electrically insulated from a first electrode 300, which is mainly for capturing electrons, the potential of the first electrode 300 is set to be higher than an output-side potential of the MCP unit 200, and, on the other hand, the potential of the second electrode 400 is set to be lower than the output-side potential of the MCP unit 200. As a result, the ion feedbacks to the MCP unit 200 are effectively suppressed.
Inventors:
Masahiro Hayashi
Application Number:
JP2015158293A
Publication Date:
January 30, 2019
Filing Date:
August 10, 2015
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
H01J43/28; H01J37/244
Domestic Patent References:
| JP57196466A |
Foreign References:
| US7564043 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama