Title:
CHARGED-PARTICLE DETECTOR
Document Type and Number:
Japanese Patent JP2009289693
Kind Code:
A
Abstract:
To provide an ion detector capable of widening an output range in which a response speed is high and linearity can be maintained.
The ion detector includes an MCP 13 and a plurality of flat shaped dynodes DY1-DY9 each having a plurality of slits. The plurality of flat shaped dynodes DY1-DY9 are laminated in parallel to an electron outputting surface 13s of the MCP 13 with spacers S in between, and a first stage flat shaped dynode faces in parallel to the electron outputting surface 13s. By this ion detector, an output signal having linearity reaching mV can be obtained and its pulse width can be shortened to around 600 ps.
Inventors:
SUYAMA MOTOHIRO
OMURA TAKAYUKI
KOBAYASHI HIROYUKI
OMURA TAKAYUKI
KOBAYASHI HIROYUKI
Application Number:
JP2008143403A
Publication Date:
December 10, 2009
Filing Date:
May 30, 2008
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
H01J43/24
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Satoru Ishida
Shiro Terasaki
Satoru Ishida