Title:
CHARGED PARTICLE DETECTOR
Document Type and Number:
Japanese Patent JP2023108257
Kind Code:
A
Abstract:
To provide a charged particle detector capable of stably acquiring a detection signal from a multi-dynode.SOLUTION: A charged particle detector 1 includes: a microchannel plate 2 having an input surface 2a on which electrons (charged particles) are input, multiplication portions 5A, 5B performing multiplication of electrons while maintaining positional information of the electrons, and an output surface 2b outputting electrons multiplied by the multiplication portions 5A, 5B; a multi-dynode 3 having a plurality of dynodes 12 multiplying the electrons output from the output surface 2b, and insulation regions 13 positioned between the dynodes 12, 12; and an anode 4 disposed in a spatial region between the output surface 2b and the multi-dynode 3, and having collection portions 21 for collecting electrons multiplied by the dynodes 12 and aperture portions 22 for allowing electrons output from the output surface 2b to pass therethrough to a dynodes 12 side. All of the insulation regions 13 overlap the collection portions 21 when viewed in an output direction of the electrons from the output surface 2b.SELECTED DRAWING: Figure 1
Inventors:
HAYASHI MASAHIRO
Application Number:
JP2022009278A
Publication Date:
August 04, 2023
Filing Date:
January 25, 2022
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
H01J43/24; H01J43/10
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Hiromitsu Nakayama
Yoshiki Kuroki
Kenichi Shibayama
Hiromitsu Nakayama
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