Title:
CHARGED PARTICLE RADIATION DEVICE, SYSTEM, METHOD, AND PROGRAM
Document Type and Number:
Japanese Patent JP2021093269
Kind Code:
A
Abstract:
To provide a charged particle radiation device capable of quickly bringing a charged object close to a target charged state, and the like.SOLUTION: There is provided a charged particle radiation device comprising: a pre-irradiation state detection unit; a learned model; an estimated charged state generation unit; a selection unit; and an irradiation unit. The pre-irradiation state detection unit detects a pre-irradiation charged state of a charged object before irradiated with charged particles. The learned model generates an estimated charged state, which is a charged state of the charged object after irradiation, by controlling charged particles under control parameters on controlled variables used to control the charged state of the charged object and charged particles to be radiated toward the charged object by inputting the control parameters. The estimated charged state generation unit generates a plurality of estimated charged states corresponding to the pre-irradiation charged state and a plurality of control parameters by inputting the pre-irradiation charged state and the plurality of control parameters to the learned model. The selection unit selects an estimated charged state nearest to a target charged state from the plurality of estimated charged states. The irradiation unit controls charged particles on the basis of control parameters corresponding to the selected estimated charged state and irradiates the charged object with the charged particles.SELECTED DRAWING: Figure 9
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Inventors:
TAKAHASHI KATSUYUKI
KIN TENKAI
TAKAGI KOICHI
KUBO KATSUYA
KANEDA YUKI
YAMAGUCHI SHINICHI
HIYOSHI ISAO
TAKEUCHI RYUICHI
NAGATA HIDEUMI
KIN TENKAI
TAKAGI KOICHI
KUBO KATSUYA
KANEDA YUKI
YAMAGUCHI SHINICHI
HIYOSHI ISAO
TAKEUCHI RYUICHI
NAGATA HIDEUMI
Application Number:
JP2019222359A
Publication Date:
June 17, 2021
Filing Date:
December 09, 2019
Export Citation:
Assignee:
SHISHIDO SEIDENKI KK
UNIV IWATE
UNIV IWATE
International Classes:
H05F3/04; G05B11/36; H01T19/04; H01T23/00
Attorney, Agent or Firm:
Shinichi Iizuka
Ken Iizuka
Ken Iizuka