PURPOSE: To prevent the damage and contamination of a terminal electrode by providing a pair of short-circuit electrodes, a power source, a magnetic flux detector, etc.

CONSTITUTION: Two probes 3 are made to contact short-circuit electrodes 8 in a pair, respectively. Next, a current is allowed to flow through each line wiring by a power source 6. The current supplied flows in parallel through a plurality of wirings, and a magnetic flux is generated in each wiring by this current. This magnetic flux is subjected to magnetic flux detection 7 to be checked for abnormality thereof, and thereby abnormality of the wiring can be checked up. When any magnetic flux is not generated particularly in the wiring on the occasion, said wiring is ascertained to be disconnected. After one wiring is checked up, the detector 7 is transferred along the direction of a column by a controlling-measuring device, and a magnetic flux generated by a subsequent line wiring is detected. On the occasion, the electrodes 8 and the probes once made to contact with each other at the beginning may be left as they are. Since no contact is made with a terminal electrode 1, the damage and contamination of the electrode 1 can be prevented.