Title:
薬液リサイクル方法および該方法に用いる装置
Document Type and Number:
Japanese Patent JP5760403
Kind Code:
B2
Inventors:
Goto Isamu
Ryuichi Tanimoto
Shigeru Okuuchi
Sakae Furuyada
Shinichi Ogata
Ryuichi Tanimoto
Shigeru Okuuchi
Sakae Furuyada
Shinichi Ogata
Application Number:
JP2010261627A
Publication Date:
August 12, 2015
Filing Date:
November 24, 2010
Export Citation:
Assignee:
Sumco inc.
International Classes:
H01L21/304; B24B37/00; B24B57/00
Domestic Patent References:
JP2003136406A | ||||
JP2009135174A | ||||
JP2009054629A | ||||
JP2010167551A |
Foreign References:
US5710069 |
Attorney, Agent or Firm:
Kenji Sugimura
Keisuke Kawahara
Keisuke Kawahara