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Title:
CHEMICAL SUPPLYING PUMP, CHEMICAL SUPPLYING DEVICE, CHEMICAL SUPPLYING SYSTEM, SUBSTRATE CLEANING DEVICE, CHEMICAL SUPPLYING METHOD, AND SUBSTRATE CLEANING METHOD
Document Type and Number:
Japanese Patent JP2000265945
Kind Code:
A
Abstract:

To achieve drastic miniaturization and simplification of a cleaning fluid supplying system including a chemical tank, to easily and quickly prepare and supply cleaning fluid having the accurate chemical density, and to restrain particles from being generated and contaminated in to cleaning fluid.

A chemical supplying system 2 is constituted of a chemical storage tank 21 for storing chemical for cleaning in the stock solution state, a chemical supplying device 22 connected to the chemical storage tank 21 and for actively perform chemical supply, a piping system 23 connected to the chemical supplying device 22 and for forming a supply passage taken as a passage for super pure water to be mixed to chemical, and a pair of discharge nozzles 24, 25 provided on the ends of the piping system 23 so as to face respective front surfaces of a wafer 11 installed in a washing chamber 1 and for supplying cleaning fluid to respective front surfaces.


Inventors:
YAMAGUCHI YOSHIAKI
NITTA TAKEHISA
MIKI MASAHIRO
Application Number:
JP31624499A
Publication Date:
September 26, 2000
Filing Date:
November 08, 1999
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
UCT KK
International Classes:
H01L21/304; B01J4/02; F04B13/02; F04B43/00; F04B43/02; F04B43/04; F04F7/00; F16K7/12; G05D11/13; (IPC1-7): F04B13/02; B01F5/12; B01J4/02; H01L21/304
Domestic Patent References:
JPH10172943A1998-06-26
JPH08136450A1996-05-31
JPH09276680A1997-10-28
JPH01139093U1989-09-22
JPS6429267A1989-01-31
JPH04224286A1992-08-13
JPH08284809A1996-10-29
JPH0953566A1997-02-25
JPH057705A1993-01-19
JPH0440270A1992-02-10
JPH03165519A1991-07-17
JPH0685025U1994-12-06
JPH09131522A1997-05-20
JPH0255881A1990-02-26
JPH0281974A1990-03-22
JPH10169562A1998-06-23
JPS5892553U1983-06-23
Foreign References:
WO1998001896A11998-01-15
WO1996026156A21996-08-29
Attorney, Agent or Firm:
Kokubun Takaetsu



 
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