Title:
化学増幅型ポジ感光性組成物、硬化膜の形成方法、硬化膜
Document Type and Number:
Japanese Patent JP5753434
Kind Code:
B2
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Inventors:
Junichi Fujimori
Application Number:
JP2011095859A
Publication Date:
July 22, 2015
Filing Date:
April 22, 2011
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; G03F7/004
Domestic Patent References:
| JP63236029A | ||||
| JP2004156024A | ||||
| JP2006111810A | ||||
| JP2009086357A |
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes