Title:
化学増幅型ポジ型レジスト組成物およびそのための共重合体
Document Type and Number:
Japanese Patent JP3994486
Kind Code:
B2
Inventors:
Hiroaki Fujishima
Yasunori Uetani
Yoshiko Miya
Yasunori Uetani
Yoshiko Miya
Application Number:
JP27857097A
Publication Date:
October 17, 2007
Filing Date:
October 13, 1997
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/004; G03F7/039; C08F222/06; C08F222/14; C08F232/00; H01L21/027
Domestic Patent References:
| JP9073173A | ||||
| JP8012626A | ||||
| JP5080515A | ||||
| JP5011450A | ||||
| JP9221526A | ||||
| JP10274852A |
Attorney, Agent or Firm:
Takashi Kuboyama