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Title:
CHUCK TABLE
Document Type and Number:
Japanese Patent JP2014072510
Kind Code:
A
Abstract:

To provide a chuck table which can hold a workpiece having a warp appropriately.

A chuck table (15) for holding a workpiece (W) comprises: a suction part (153) having a suction surface (153a) for suction holding the workpiece; and an annular seal (154) formed of an elastic member so as to surround the suction part and supporting the outer periphery (W2) of the workpiece. The suction part is connected with a negative pressure generation source for generating suction force in the suction surface, and the annular seal is formed so that the upper surface (154a) is higher than the suction surface. When suction holding the workpiece, a negative pressure leaked from a gap between the workpiece and the suction surface acts on a space formed by the outer peripheral part of the workpiece and the annular seal abutting each other, thus deforming the workpiece so as to be flush with the annular seal.


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Inventors:
IIZUKA KENTARO
TERAJIMA MASATO
Application Number:
JP2012220248A
Publication Date:
April 21, 2014
Filing Date:
October 02, 2012
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/683; B23K26/10; B23Q3/08; H01L21/301
Domestic Patent References:
JPH11309638A1999-11-09
JPH0584682A1993-04-06
JP2010153419A2010-07-08
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi



 
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