To provide a circuit pattern inspection device and its method capable of detecting an open/short state of a conductive pattern by a single sensor unit.
When inspecting the quality of the conductive pattern 2 arranged in a row on a glass substrate 3 in a non-contact state, a power supply unit 12 for supplying an inspection signal and a sensor 13 for detecting the signal are arranged in close vicinity to each other. Such a constitution can surely detect an open state because a remarkable difference in detecting levels of an inspection current by the sensor 13 is generated between when the sensor 13 is on the normal conductive pattern with no open state and when the sensor 13 is positioned on the conductive pattern having an open portion.
COPYRIGHT: (C)2010,JPO&INPIT
Hidetsugu Yamaoka
Ishioka Seigo
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| KR1020050004046A |
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tetsuya Kazama
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen
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