Title:
CIRCULATION DEVICE, AND CONTROL METHOD THEREOF
Document Type and Number:
Japanese Patent JP2023142433
Kind Code:
A
Abstract:
To quickly bring the temperature and the flow rate of a treatment liquid to desired values.SOLUTION: When the temperature of a liquid is increased, after a pump is accelerated at a first acceleration until the speed of the pump reaches a first predetermined speed, until the speed of the pump reaches a second predetermined speed that is higher than the first predetermined speed, the pump is accelerated at a second acceleration that is lower than the first acceleration.SELECTED DRAWING: Figure 12
Inventors:
KAWAGUCHI TATSUHIKO
Application Number:
JP2022049347A
Publication Date:
October 05, 2023
Filing Date:
March 25, 2022
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
H01L21/304
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita