Title:
クリーンブース空気清浄度管理システム
Document Type and Number:
Japanese Patent JP7446671
Kind Code:
B2
Abstract:
To provide a clean booth air cleanliness management system capable of preventing air from flowing back into a work booth and also maintaining cleanliness of air in the work booth.SOLUTION: A clean booth air cleanliness management system 10 has: first measuring means which measures the quantity of air fed from a fan filter unit 13 or a package air conditioner 13; target value first comparing means which compares a first measured air quantity measured by the first measuring means with a previously set first target air quantity; and air quantity increasing means which increases, when the target value first comparing means compares the first measured air quantity with the first target air quantity to determine that the first measured air quantity is equal to or less than the first target air quantity, the quantity of air fed from the fan filter unit 13 or the package air conditioner 13 to a work booth 17.SELECTED DRAWING: Figure 3
Inventors:
Yu Furukawa
Mitsuteru Tada
Mitsuteru Tada
Application Number:
JP2019194155A
Publication Date:
March 11, 2024
Filing Date:
October 25, 2019
Export Citation:
Assignee:
Daidan Co., Ltd.
International Classes:
F24F7/06; B01L1/00; F24F7/007; F24F11/74; F24F11/77
Domestic Patent References:
| JP2019095152A | ||||
| JP2003279115A | ||||
| JP59069919A | ||||
| JP2002061943A | ||||
| JP61107030A |
Attorney, Agent or Firm:
Yoshitaka Kobayashi