Title:
CLEAN GUIDED VEHICLE
Document Type and Number:
Japanese Patent JP3882139
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a clean guided vehicle in which cleanliness in a clean box for containing articles to be carried, e.g. cassettes, can be kept at a high level constantly.
SOLUTION: A clean box having an opening for transferring articles 13 being carried, e.g. cassettes, in one side face and containing the articles 13 being carried are placed on a carriage 1 such that the opening can turn between a front position and a side position of the carriage, an evacuating section 20 is formed at a position facing the opening of the clean box, and a fan filter unit 19 is disposed in front of the carriage. When the clean guided vehicle travels, the opening of the clean box is directed toward the fan filter unit and clean air is blown into the clean box from the fan filter unit. When articles being carried are transferred, the opening is directed toward the station 18 side on the side of the truck and clean air is blown into the clean box from the station side.
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Inventors:
Yoshio Takakura
Hiroshi Rarebe
Arai Yasumasa
Toshihiro Hashimoto
Tokuharu Sugiyama
Hajime Iinuma
Harumasa Yamamoto
Naoki Shimakawa
Endo Yoshiya
Hiroshi Rarebe
Arai Yasumasa
Toshihiro Hashimoto
Tokuharu Sugiyama
Hajime Iinuma
Harumasa Yamamoto
Naoki Shimakawa
Endo Yoshiya
Application Number:
JP2002194027A
Publication Date:
February 14, 2007
Filing Date:
July 03, 2002
Export Citation:
Assignee:
Hitachi Plant Technology Co., Ltd.
International Classes:
B62B5/00; H01L21/677; B65G1/00; B65G1/06; B65G49/07; F24F7/06; H01L21/68; (IPC1-7): H01L21/68; B62B5/00; B65G1/00; B65G1/06; B65G49/07; F24F7/06
Domestic Patent References:
| JP11301475A | ||||
| JP10303274A | ||||
| JP10278782A | ||||
| JP2001185597A |
Attorney, Agent or Firm:
Osamu Mori