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Title:
クリーン熱処理装置
Document Type and Number:
Japanese Patent JP7073016
Kind Code:
B2
Abstract:
To efficiently and uniformly heat and cool a treated product, and to reduce an installation area of a heat treatment device, in the clean heat treatment device for heating and cooling the treated product in a clean atmosphere.SOLUTION: A clean heat treatment device is separated into an upper stage part 13, a middle stage part 14 and a lower stage part 15, a treatment part 30 is arranged at the middle stage part, and a gas is introduced to the upper state part or the lower stage part from a derivation part 35 after treating a treated product x which is rotated by being placed on a rotating table 32 by introducing the treatment gas thereto from an introduction part 31. Then, a heating part 20 for blowing the gas which is heated by a heating device 21 by a hot wind fan 23 is arranged at either of the upper stage part and the lower stage part, a cooling part 40 for blowing the gas which is cooled by a cooling device 43 by a cooling fan 44 is arranged at the other, and a filter F is arranged at either of the heating part and the cooling part.SELECTED DRAWING: Figure 1

Inventors:
Nariaki Shinjo
Nishio Tsutomu
Application Number:
JP2020003052A
Publication Date:
May 23, 2022
Filing Date:
January 10, 2020
Export Citation:
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Assignee:
Chugai Furnace Industry Co., Ltd.
International Classes:
F27B17/00; F24F7/06; F24F13/02; F24F13/08; F27D7/04; F27D9/00
Domestic Patent References:
JP2017120154A
JP2007271126A
JP2004353928A
JP2003507881A
Foreign References:
WO2012114779A1
Attorney, Agent or Firm:
Matsukawa Katsuaki