To provide a clean oven, for performing heat treatment in clean high temperature atmospheric gas up to about 500°C, by largely reducing electric power consumption.
This clean oven 1 heat-treats a treating object placed in a heat treatment chamber 6 in the clean atmospheric gas, by passing through a filter 11 and the heat treatment chamber 6, by heating the atmospheric gas in the oven by a heater 8, while circulating the gas; and is constituted so that the heat resistant filter 11 having the heat resistant temperature of about 500°C is arranged as the filter, and a cooler 16 is arranged in a bypass passage, by arranging a cooling bypass passage 15 in a part of a circulating passage of the atmospheric gas, and first and second switching boards 17a and 17b are arranged as a passage switching means for switching the circulating passage and the bypass passage.
KURITANI AKIRA
ARII HIRONOBU
OKAMOTO MASATO
SHIMONO KIYONORI
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