Title:
CLEAN ROOM POLLUTANT REMOVING SYSTEM
Document Type and Number:
Japanese Patent JP3941029
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce running costs by removing pollutants efficiently by simple constitution.
SOLUTION: In a clean room pollutant removing system for removing specific pollutants existing in the air in a clean room 1, a wet pollutant removing means 3 for removing the pollutants by bringing the air containing the pollutants into contact with liquid is installed, and the air in the clean room 1 is sucked into the means 3, and the purified air is circulated in the room 1. The means 3 has a cooling tank 5 for cooling the liquid by chilled water, and low temperature water cooled by the cooling tank 5 is brought into contact with the air containing the pollutants.
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Inventors:
Suzuki Ordinance
Tomoaki Kajima
Nasuhara Kura
Hiroshi Harada
Yoshinobu Suzuki
Takeshi Shiratani
Michio Haginoya
Takeshi Sekiguchi
Tomoaki Kajima
Nasuhara Kura
Hiroshi Harada
Yoshinobu Suzuki
Takeshi Shiratani
Michio Haginoya
Takeshi Sekiguchi
Application Number:
JP9560399A
Publication Date:
July 04, 2007
Filing Date:
April 02, 1999
Export Citation:
Assignee:
Shimizu Construction Co., Ltd.
International Classes:
A61L9/16; B01D53/14; B01D47/06; B01D53/18; F24F7/06; (IPC1-7): B01D53/14; A61L9/16; B01D47/06; B01D53/18; F24F7/06
Domestic Patent References:
JP10205822A |
Attorney, Agent or Firm:
Ryukichi Abe
Hirukawa Masanobu
Norihiko Uchida
Hideo Sugai
Kenji Aoki
Hiroshi Nagisawa
Akira Yonezawa
Hirukawa Masanobu
Norihiko Uchida
Hideo Sugai
Kenji Aoki
Hiroshi Nagisawa
Akira Yonezawa