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Patent Searching and Data


Title:
CLEAN ROOM POLLUTANT REMOVING SYSTEM
Document Type and Number:
Japanese Patent JP3941029
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To reduce running costs by removing pollutants efficiently by simple constitution.
SOLUTION: In a clean room pollutant removing system for removing specific pollutants existing in the air in a clean room 1, a wet pollutant removing means 3 for removing the pollutants by bringing the air containing the pollutants into contact with liquid is installed, and the air in the clean room 1 is sucked into the means 3, and the purified air is circulated in the room 1. The means 3 has a cooling tank 5 for cooling the liquid by chilled water, and low temperature water cooled by the cooling tank 5 is brought into contact with the air containing the pollutants.


Inventors:
Suzuki Ordinance
Tomoaki Kajima
Nasuhara Kura
Hiroshi Harada
Yoshinobu Suzuki
Takeshi Shiratani
Michio Haginoya
Takeshi Sekiguchi
Application Number:
JP9560399A
Publication Date:
July 04, 2007
Filing Date:
April 02, 1999
Export Citation:
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Assignee:
Shimizu Construction Co., Ltd.
International Classes:
A61L9/16; B01D53/14; B01D47/06; B01D53/18; F24F7/06; (IPC1-7): B01D53/14; A61L9/16; B01D47/06; B01D53/18; F24F7/06
Domestic Patent References:
JP10205822A
Attorney, Agent or Firm:
Ryukichi Abe
Hirukawa Masanobu
Norihiko Uchida
Hideo Sugai
Kenji Aoki
Hiroshi Nagisawa
Akira Yonezawa