Title:
CLEAN ROOM
Document Type and Number:
Japanese Patent JPH1163602
Kind Code:
A
Abstract:
To provide a clean room with low initial cost and running cost.
A highly clean region requiring high cleanliness partially is formed to a clean room 10. Multiple clean air blowing units (FFU) 31, 32... are arranged to the ceiling part 12 corresponding to the outer circumference part of the highly clean region continuously and densely, and cleaned air is blown from the air outlet of the space 14 under a roof into the inside of the clean room 10. Multiple spaces for installing multiple FFUs 34 are arranged to the ceiling part 12 on the side of high cleanliness region discontinuously and sparsely, and supply clean air to the highly clean region.
Inventors:
KAMIYA MATSUO
KATO KOJI
WATANABE KOJI
SAIKI ATSUSHI
HIRATA JUNTA
KATO KOJI
WATANABE KOJI
SAIKI ATSUSHI
HIRATA JUNTA
Application Number:
JP22761497A
Publication Date:
March 05, 1999
Filing Date:
August 08, 1997
Export Citation:
Assignee:
HITACHI PLANT ENG & CONSTR CO
International Classes:
F24F7/06; (IPC1-7): F24F7/06
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