Title:
CLEANING DEVICE AND CLEANING METHOD
Document Type and Number:
Japanese Patent JP2015146352
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a cleaning device capable of cleaning a substrate including a loading table for loading the substrate thereon without leaving an uncleaned part when cleaning the substrate.SOLUTION: Disclosed is a cleaning device equipped with a plurality of nozzles 1a to 1c for discharging the cleaning fluid for cleaning a substrate 10. This device includes discharge direction changing means 2a to 2c for changing discharge directions of a plurality of nozzles 1 independently from each other. Also, a cleaning method includes a step for changing the discharge direction of the cleaning liquid of at least one nozzle out of the plurality of nozzles 1a to 1c.
Inventors:
MIYANARI ATSUSHI
TAKASE SHINJI
TAKASE SHINJI
Application Number:
JP2014017857A
Publication Date:
August 13, 2015
Filing Date:
January 31, 2014
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
H01L21/304; B05B15/68
Attorney, Agent or Firm:
Harakenzo world patent & trademark
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