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Title:
CLEANING DEVICE
Document Type and Number:
Japanese Patent JP2003230868
Kind Code:
A
Abstract:

To provide a method for preventing a level sensor from malfunction by removing a reaction product with a simple operation if a liquid level sensor tube is clogged, or regularly.

In an automatic cleaning device comprising a treatment tank 3 to which a liquid chemical 7 is supplied, tubes 4, 5 mounted inside the tank 3, a liquid level sensor 6 which sends a gas into the tubes 4, 5 at a constant pressure and detects a differential pressure between a pressure in the chemical 7 and the atmospheric pressure to output a liquid level signal in the tank 3 and a liquid chemical supply section 15 which supplies and stops the liquid chemical to the tank 3 in accordance with the liquid level signal outputted by the level sensor 6, a tube cleaning means 8 for pressurizing a fluid into the tubes 4, 5 is provided.


Inventors:
NAKATAMARI SHINOBU
Application Number:
JP2002032258A
Publication Date:
August 19, 2003
Filing Date:
February 08, 2002
Export Citation:
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Assignee:
SONY CORP
International Classes:
B08B5/02; B08B9/02; H01L21/304; (IPC1-7): B08B9/02; B08B5/02; H01L21/304
Attorney, Agent or Firm:
Hisashi Kato



 
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