PURPOSE: To give a composite vibration which spreads in all directions to a material to be cleaned and thereby enhance a cleaning capability by suspending a vibration plate equipped with a means for giving a composite vibration by a vibration damping spring, and at the same time, arranging means for supporting the material to be cleaned which soaks it in a cleaning liquid and a lifting means.

CONSTITUTION: When cleaning a material to be cleaned, first a busket 9 storing the material is deposited on a roller conveyor 7 and then is moved to the top of an ultrasonic cleaning tank 1 using a cylinder 10. Next, a vibrator 30 is guided by a guide pole 31 and allowed to descend by activating a cylinder 34, and the busket 9 held by a support frame 50 is immersed in the cleaning liquid of the cleaning tank 1. After that, the material is cleaned by the cleaning liquid flowing into and out of a space between the materials by activating the vibrator 30 to give vibration in all directions. Further, the busket 9 is moved to the top of a desiccator medium 4, and the material is dried by blowing a hot blast from a hot blast ejection aperture 4a. In this case, the vibration plate of the vibrator 30 is supported by suspending the plate using a vibration damping spring.