Title:
CLEANING DEVICE
Document Type and Number:
Japanese Patent JPS5988828
Kind Code:
A
Abstract:
PURPOSE:To perform good cleaning without preventing extra high pressure water jet by water droplets adhering to a nozzle by arranging a sucking hole around an aperture of the nozzle. CONSTITUTION:A substrate 17 is rotated with being fixed to a table 18 whereas a pressure pump jets extra high pressure water jet 16 through an end thin hole 12 of a nozzle 11, thereby cleaning the substrate. At this time, minute particles of water 19 are generated and water droplets 20 adheres to the nozzle 11. Then a hole 13 which is sucked vacuously by a device 14 is arranged around the nozzle end thin hole 12 to suck up covering water droplets 20. The vacuum hole 13 is preferably porous. This constitution enables good cleaning without preventing extra high pressure water jet by water droplets.
Inventors:
TAKEBASHI NOBUHAYA
Application Number:
JP19921682A
Publication Date:
May 22, 1984
Filing Date:
November 12, 1982
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B08B3/02; H01L21/00; H01L21/304; (IPC1-7): B08B3/02
Attorney, Agent or Firm:
Toshio Nakao