Title:
Cleaning equipment using a plasma generator and a plasma generator
Document Type and Number:
Japanese Patent JP6099007
Kind Code:
B2
Abstract:
A plasma generation device (1), provided with: a plasma generator (10), a plasma power supply unit (2), and a gas supply unit (3). The plasma generator includes a partition part (12) for dividing the liquid housing unit (15) and the gas housing unit (14) from each other. The partition part has a gas channel (13) for guiding the gas supplied from the gas supply unit and housed in the gas housing unit to the liquid housing unit. The first electrode (18) is disposed in the gas housing unit and the second electrode (19) is disposed in the liquid housing unit. The plasma power supply unit generates a potential supplied to the first and second electrodes and sets the potential of the second electrode to a lower value than that of the potential of the first electrode. The second electrode is formed from a material, a material compound, or a material mixture that causes sputtering phenomenon.
Inventors:
Shigetoshi Saki
Wataru Mitsumatsu
Wataru Mitsumatsu
Application Number:
JP2012274607A
Publication Date:
March 22, 2017
Filing Date:
December 17, 2012
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
H05H1/24; A45D27/46; B08B3/10; B26B19/44
Domestic Patent References:
| JP2012043769A | ||||
| JP2008178870A |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda
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