Title:
半導体基板用洗浄液
Document Type and Number:
Japanese Patent JP4485786
Kind Code:
B2
Inventors:
Masayuki Takashima
Kasama Yoshiko
Hiroaki Tomimori
Hidemitsu Aoki
Kasama Yoshiko
Hiroaki Tomimori
Hidemitsu Aoki
Application Number:
JP2003430664A
Publication Date:
June 23, 2010
Filing Date:
December 25, 2003
Export Citation:
Assignee:
Kanto Chemical Co., Ltd.
Renesas Electronics Corporation
Renesas Electronics Corporation
International Classes:
C11D1/722; H01L21/304; C11D3/04; C11D3/20; C11D3/28; C11D3/30; C11D3/33; C11D3/34; C11D3/36
Domestic Patent References:
| JP2000208467A | ||||
| JP2001217215A | ||||
| JP2001345303A |
Attorney, Agent or Firm:
Hideto Asamura
Hajime Asamura
Kajiwara Saiko
Yukihiro Ikeda
Toru Nakayama
Hajime Asamura
Kajiwara Saiko
Yukihiro Ikeda
Toru Nakayama