PURPOSE: To provide a cleaning method by which the cleaning function of members which carry out cleaning can be kept for a remarkably long duration and by which the time for maintenance of appliances can be extended and provide a cleaning apparatus.
CONSTITUTION: The objective method and apparatus aim to remove dust adhering to a thin sheet-like object to be cleaned through a plurality of cleaning processes and make the object super clean. Among the cleaning processes. For at least first and final cleaning processes, either one or combined process selected from a high pressure water jetting cleaning process to jet out ultra-pure water with high pressure, a high pressure water jetting cleaning process to jet out ultra-pure water having cavitation, and an ultrasonic cleaning process to jet out ultra-pure water to which ultrasonic vibration energy is applied through a nozzle is employed.
ONO KOJI
TSUJIMURA MANABU
