Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CLEANING PROCESSOR AND METHOD FOR REUSING ATMOSPHERIC FLUID
Document Type and Number:
Japanese Patent JP2000315673
Kind Code:
A
Abstract:

To provide a cleaning processor capable of reducing cost for obtaining clean air and miniaturizing an apparatus.

An atmospheric fluid in an apparatus is supplied upward of a circulating tank 19 by a fan 25. This atmospheric fluid is separated into a gas and a liquid through their collision with a gas/liquid separate plate 22. Namely, the atmospheric fluid collides with the gas/liquid separate plate 22 and is also supplied upward by the fan 25, and the liquid is dropped downward with water from a shower 23 and is stored in the circulating tank 19. Furthermore, the gas which is separated into gas and liquid rises upward, and a mist component is removed by a mist catcher 24. Moreover, the gas in which the mist component is removed is filtered by a ULPA filter 26 to turn into a clean air, which is supplied to the apparatus through recycling.


Inventors:
SATO MIZUO
Application Number:
JP12507199A
Publication Date:
November 14, 2000
Filing Date:
April 30, 1999
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SEIKO EPSON CORP
International Classes:
B01D53/18; H01L21/304; (IPC1-7): H01L21/304; B01D53/18
Attorney, Agent or Firm:
Kisaburo Suzuki (2 outside)