Title:
CLEANING TANK
Document Type and Number:
Japanese Patent JPH11290801
Kind Code:
A
Abstract:
To increase a circulating amount in a tank main body without increasing a discharge amount of a cleaning liquid.
A cleaning tank 20 is equipped with a tank main body 11 for cleaning a material to be cleaned 2 with a cleaning liquid 1 to be supplied by containing the material to be cleaned inside: a discharge pipe 2 wherein it is disposed downward inside the tank main body 11, and a discharge hole for discharging the cleaning liquid 1 is formed along its longitudinal direction: and a couple of guide boards 21 which surround an outer peripheral surface on the discharge hole side of the discharge pipe 12 via a specific interval from the outer peripheral surface of the discharge pipe 12, and open a specific range near the discharge hole.
Inventors:
ASAKA ATSUYASU
Application Number:
JP9900398A
Publication Date:
October 26, 1999
Filing Date:
April 10, 1998
Export Citation:
Assignee:
KAIJO KK
International Classes:
B08B3/10; H01L21/304; (IPC1-7): B08B3/10; H01L21/304
Attorney, Agent or Firm:
Koichi Fujii (1 person outside)
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