Title:
TREATING DEVICE AND TREATMENT
Document Type and Number:
Japanese Patent JP3152885
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To control the deflection of expanding parts of a substrate to be treated to keep the substrate to be treated level and to enable uniform coating of treating liquid.
SOLUTION: On an inclined surface of an inner vessel, plural support pins 17 are erected. The tops of the support pins 17 are positioned in the same horizontal plane as the upper end surface of a spin chuck 1 which is an attractive surface on which a substrate G is attracted, and support expanding parts of the substrate G held by the spin chuck 1 to keep the surface of the substrate G level. After that, the spin chuck 1 is raised to separate the substrate G from the support pins 17, and then the spin chuck 1 is rotated to spread and dry a developer.
Inventors:
Dr. Hashimoto
Kiyohisa Tateyama
Kiyohisa Tateyama
Application Number:
JP35099496A
Publication Date:
April 03, 2001
Filing Date:
December 27, 1996
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G02F1/1333; B05C11/08; B05D1/40; G03F7/30; H01L21/027; H01L21/683; (IPC1-7): B05C11/08; B05D1/40; G03F7/30; H01L21/027
Domestic Patent References:
| JP7245256A | ||||
| JP5160102A | ||||
| JP817722A | ||||
| JP63115214U | ||||
| JP670962B2 |
Attorney, Agent or Firm:
Saichi Suyama