To provide a coating apparatus which accurately applies a liquid to an application region at a low cost.
An aperture formed in a mask 4 is placed on the opposite to a groove (an application region) of a substrate 1 and in such a positioning situation, an organic EL material is discharged from a nozzle 5 to the mask and supplied to the substrate 1 through the aperture of the mask 4. Consequently, the organic EL material is applied selectively to the groove of the substrate 1 on the opposite to the aperture and at the same time the organic EL material is reliably prevented from application to regions other than the groove. That is, the organic EL material is accurately applied to the groove (the application region). The organic EL material adhering to the mask 4 is washed away by a mask washing unit 7, so that the mask 4 is used repeatedly and accordingly, the running cost is lowered.
TAKAMURA YUKIHIRO
MORIWAKI SANZO
Kakusho Shoichi
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