パターン反転のための被覆組成物

Title:

パターン反転のための被覆組成物

Document Type and Number:

Japanese Patent JP7011229

Kind Code:

B2

Abstract:

and contains 50% by mole to 100% by mole of a hydrolysable silane in which a is 0 and 0% by mole to 50% by mole of a hydrolysable silane in which a is 1 or 2. The alcohol is propylene glycol monomethyl ether, propylene glycol monoethyl ether, or 3-methoxybutanol.

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Inventors:

Hiroaki Taniguchi
Nakajima Makoto
Endo Yuki
Wataru Shibayama
Shuhei Shigaki

Application Number:

JP2018543893A

Publication Date:

February 10, 2022

Filing Date:

October 02, 2017

Export Citation:

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Assignee:

Nissan Chemical Co., Ltd.

International Classes:

C09D183/04; B05D1/32; B05D1/36; B05D3/10; B05D7/00; B05D7/24; C09D5/00; G03F7/40; H01L21/027

Domestic Patent References:

JP2012533674A
JP2010020109A
JP2009128564A
JP2015038221A
JP2001033949A
JP2011118373A

Foreign References:

WO2016031563A1

Attorney, Agent or Firm:

Hanabusa Patent and Trademark Office

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