Title:
塗布装置、塗布方法、塗布、現像装置及び記憶媒体
Document Type and Number:
Japanese Patent JP4748192
Kind Code:
B2
Inventors:
Akihiro Kubo
Application Number:
JP2008204358A
Publication Date:
August 17, 2011
Filing Date:
August 07, 2008
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; B05C11/08; B05D1/40
Domestic Patent References:
| JP3178123A | ||||
| JP4368117A | ||||
| JP7335518A | ||||
| JP8293457A | ||||
| JP10043666A | ||||
| JP2001239202A | ||||
| JP2001291660A | ||||
| JP2002141273A | ||||
| JP2003257850A | ||||
| JP2007058200A |
Attorney, Agent or Firm:
Toshio Inoue
Tomoaki Miida
Tomoaki Miida