Title:
COATING DEVICE
Document Type and Number:
Japanese Patent JP2893146
Kind Code:
B2
Abstract:
PURPOSE: To obtain a coating device for which the coating liquid adhering to a cup can be uniformly and efficiently washed away with a less amount of a washing liquid in a short time and, at the same time, which is simplified in structure.
CONSTITUTION: A washing liquid L is supplied into a washing jig 30 from a washing liquid supplying nozzle 40 through an inlet 33 and, at the same time, the jig 30 is rotated by means of a spin chuck 30. When the jig 30 is rotated, the liquid L is collected in a reservoir section 35 by the centrifugal force caused by the rotation and jetted toward an external and internal cups 23 and 24 through discharge holes 36 installed to the section 35.
Inventors:
AKUMOTO MASAMI
FUJIMOTO AKIHIRO
FUJIMOTO AKIHIRO
Application Number:
JP26864491A
Publication Date:
May 17, 1999
Filing Date:
September 20, 1991
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
B05C11/08; G03F7/16; H01L21/027; H01L21/30; H01L21/304; H01L21/31; (IPC1-7): H01L21/027; B05C11/08; G03F7/16
Domestic Patent References:
| JP47060A |
Attorney, Agent or Firm:
Kikuhiko Nakamoto