Title:
塗布装置
Document Type and Number:
Japanese Patent JP5052942
Kind Code:
B2
Inventors:
Makoto Abe
Satoshi Suzuki
Satoshi Suzuki
Application Number:
JP2007101024A
Publication Date:
October 17, 2012
Filing Date:
April 06, 2007
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B05C9/12; B05C5/00
Domestic Patent References:
| JP2003297569A | ||||
| JP2006192435A | ||||
| JP2001300383A | ||||
| JP9272199A | ||||
| JP200738135A |
Attorney, Agent or Firm:
Masahiro Matsusaka