Title:
塗布膜形成装置
Document Type and Number:
Japanese Patent JP4068437
Kind Code:
B2
Inventors:
Takahiro Kitano
Norihisa Koga
Toshichika Takei
Yoshiyuki Kawabuchi
Norihisa Koga
Toshichika Takei
Yoshiyuki Kawabuchi
Application Number:
JP2002337095A
Publication Date:
March 26, 2008
Filing Date:
November 20, 2002
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G03F7/16; H01L21/027; B05C11/08; B05C11/10
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Attorney, Agent or Firm:
Toshio Inoue
Mizuno Hiromi
Mizuno Hiromi