Title:
Coating liquid for insulating film formation
Document Type and Number:
Japanese Patent JP6269768
Kind Code:
B2
Inventors:
Yuji Sone
Naoyuki Ueda
Yuki Nakamura
High Mikiko Ta
Shinji Matsumoto
Ryoichi Saotome
Niie Sadanori
Yukiko Abe
Naoyuki Ueda
Yuki Nakamura
High Mikiko Ta
Shinji Matsumoto
Ryoichi Saotome
Niie Sadanori
Yukiko Abe
Application Number:
JP2016190885A
Publication Date:
January 31, 2018
Filing Date:
September 29, 2016
Export Citation:
Assignee:
株式会社リコー
International Classes:
H01L21/336; H01L21/312; H01L29/786
Domestic Patent References:
| JP5214296A | ||||
| JP99003926A1 | ||||
| JP2008016802A | ||||
| JP2008016806A | ||||
| JP2011100975A |
Foreign References:
| US20080001152 | ||||
| US20080001150 | ||||
| US6448331 |
Attorney, Agent or Firm:
Koichi Hirota