Title:
COATING LIQUID SUPPLY SYSTEM
Document Type and Number:
Japanese Patent JP2009000596
Kind Code:
A
Abstract:
To provide a coating supply system which is capable of applying a large amount of a coating liquid with a constant temperature at a breath.
A pump 8 of a second circulation pathway 3 is always driven to keep the temperature of a development solution in a tank 1 constant. In this state, a pump 4 of a first circulation pathway 2 is driven to send the development solution pumped out by the pump 4 to a slit nozzle 6. At this time, if an on-off valve 7 is closed, the development solution supplied into the slit nozzle 6 flows down from a slit like discharge port 6d to the lower part in a state like a curtain and is supplied to the surface of a substrate to be treated.
Inventors:
SHIMAI FUTOSHI
Application Number:
JP2007161978A
Publication Date:
January 08, 2009
Filing Date:
June 20, 2007
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
B05C11/10; B05C5/02; H01L21/027; G03F7/30
Domestic Patent References:
JPH03202488A | 1991-09-04 | |||
JPH11319675A | 1999-11-24 | |||
JP2001009342A | 2001-01-16 |
Attorney, Agent or Firm:
Yu Koyama
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