PURPOSE: To deposit an evaporation metal by evaporation at an excellent yield on a web-like polymer by providing a cylindrical support with blinds at a specific angle against a metal evaporation source at the time of depositing a thin metal film on the surface of the web-like polymer moving along the cylindrical support within a vacuum chamber.
CONSTITUTION: The web-like polymer 2 is wound around the outer peripheral surface of the cylindrical support 1 rotating within the vacuum chamber and while the polymer 2 is moved in an arrow direction, the metal or alloy in an evaporator crucible 4 is evaporated to form a vapor deposited film of a thickness below 1000 nm on the web- like polymer 2. In such a case, the cylindrical support is provided with the two blinds 3, 3' for restricting the threshold angle at which the metal vapor comes into contact with the surface of the polymer 2 and the polymer is masked by the blinds 3, 3' in such a manner that a region 5 determined by the normal to the cylindrical support 1 at their ends and the angles α1, α2 formed by the coupling line of a crucible 4 center and the ends of the blind is in a coagulating range of the evaporation metal, by which the molten metal in the crucible 4 is deposited at the high yield on the polymer 2.
HANSUUPEETAA SHIRUTOBERUKU
HARUTOMUUTO HIBUSUTO
