COLD-CATHODE FIELD ELECTRON EMISSION ELEMENT AND METHOD OF MANUFACTURING SAME

Title:

COLD-CATHODE FIELD ELECTRON EMISSION ELEMENT AND METHOD OF MANUFACTURING SAME

Document Type and Number:

Japanese Patent JP2007149594

Kind Code:

A

Abstract:

To provide a cold-cathode field electron emission element capable of efficient electron emission by low-voltage drive.

A support 101, a cathode electrode 102, the insulating layer 103, a gate electrode 104 having a gate hole 106 and a resist 107 are laminated and coated, a carbon material arranging hole 121 having diameter smaller than a gate hole 106 is formed from the gate hole 106 to the cathode electrode 102, then catalyst metals 109, 110 are coated and formed, lift-off treatment of the resist 107 and expansion treatment of the carbon material arranging hole 121 are performed, then, a carbon material 111 such as a carbon nanotube is developed on the catalyst metal 110. Thus, the cold-cathode field electron emission element is manufactured.

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Inventors:

TAKEUCHI YASUMASA
KISHINO TAKAO
UDA TATSUO

Application Number:

JP2005345539A

Publication Date:

June 14, 2007

Filing Date:

November 30, 2005

Export Citation:

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Assignee:

KOKUSAI KIBAN ZAIRYO KENKYUSHO

International Classes:

H01J1/304; H01J9/02

Domestic Patent References:

JP2001126609A	2001-05-11
JP2003007200A	2003-01-10
JP2006324209A	2006-11-30
JP2005276601A	2005-10-06
JP2005518636A	2005-06-23

Attorney, Agent or Firm:

Shuichi Otsuka

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