PURPOSE: To perform the joining in which temperature rising or deformation of an article to be joined, is impermissible in a vacuum container at room temperature by remote control in a cold joining device to be applied to joining in precision and high accuracy such as the assembly of sensor parts or micro- machines.
CONSTITUTION: The article 1 to be joined is arranged in a vacuum container and irradiated horizontally with an argon ion beam at room temperature in a horizontal posture first; after the article 1 is cleaned by removing the impure atoms on its joining face, it is pressurized vertically by a press rod 15 in a vertical posture. The article to be joined is rotated by rotating a holder A2 and holder B16 through a gear A9, gear B10, gear C31 and a flexible shaft 11 by means of a motor 8. After the completion of the joining operation, the press rod 15 is elevated, the vacuum container is atmospherically released, and the article is taken out by disengaging it from the holder A2 and holder B16.
KAWAI YUKIHIRO
KOIWA MASAMI
FUJITANI YASUYUKI
TOYODA MASAHIKO
Next Patent: LASER MACHINING METHOD AND DEVICE THEREFOR