Title:
コリメーション評価装置およびコリメーション評価方法
Document Type and Number:
Japanese Patent JP6654830
Kind Code:
B2
Abstract:
A collimation evaluation device includes a first reflection member, a second reflection member, a screen, and a housing. A first reflection surface of the first reflection member and a first reflection surface of the second reflection member face each other and are parallel to each other. Further, interference fringes are formed on the screen by light L12 reflected on the first reflection surface of the first reflection member and a second reflection surface of the second reflection member and light L21 reflected on a second reflection surface of the first reflection member and the first reflection surface of the second reflection member, and collimation of incident light is evaluated on the basis of a direction of the interference fringes.
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Inventors:
Okuma Souji
Yasunori Igasaki
Yasunaga Nara
Yasunori Igasaki
Yasunaga Nara
Application Number:
JP2015165801A
Publication Date:
February 26, 2020
Filing Date:
August 25, 2015
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01M11/02; F21V11/00; F21V13/10; G01B9/02; G01M11/00
Domestic Patent References:
| JP2006516737A | ||||
| JP2006294972A | ||||
| JP2000249510A | ||||
| JP62197706A | ||||
| JP2016031333A |
Foreign References:
| US20040051877 |
Other References:
APPLIED OPTICS,1993年 8月 1日,Vol.32 No.22,4199~4203
OPTICAL ENGINEERING,1993年 1月,Vol.32 No.1,p.94~100
OPTICAL ENGINEERING,1993年 1月,Vol.32 No.1,p.94~100
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Masatoshi Shibata
Yoshiki Kuroki
Kenichi Shibayama
Masatoshi Shibata