To form color filters having good flatness as color filters of a primary color system formed by using pigment dispersed resists.

R patterns 21a are formed of the film thickness meeting the film thickness difference between a filter layer 23 of B and a filter layer 21 of R within the recessed parts 12 corresponding to the color pixels of R with, for example, the filter layer of B which is thinnest in the film thickness as a reference. Similarly, G patterns 22a are formed of the film thickness meeting the film thickness difference between the filter layer 23 of B and the filter layer 22 of G within the recessed parts 12 corresponding to the color pixels of G. After a base planarization layer 17 is formed, the filter layers 21, 22, 23 of R, G, B are formed respectively of the same film thickness in the respective sections corresponding to the respective color pixels. As a result, the constitution to allow the enhancement of the flatness of the surface of the respective filter layers 21, 22, 23 is attained.