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Title:
COLORING RESIST-BURNING OVEN WITH ROBOT ARM AND METHOD FOR COLORING RESIST-BURNING
Document Type and Number:
Japanese Patent JPH11270970
Kind Code:
A
Abstract:

To provide a burning oven with a robot arm and a method for burning free of solidification and attachment of sublimated gas generated in an oven in a burning process of an organic color filter.

A robot arm equipped coloring resist-burning oven 1 is an oven equipped with a robot arm for burning an organic color filter by carrying a substrate material 12 having a coloring resist film on a substrate into and out of the oven by means of a robot arm 20, an arm part 22 of the robot arm 20 is made of a bar material for heating, and a hot plate 30 is provided for preheating the substrate material 12. In this case, the substrate material 12 preheated on the hot plate 30 is placed on the heated arm part 22, carried into the burning oven to be burned, and the burned substrate material 12 is placed on the heated arm part 22, and then carried out of the oven.


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Inventors:
NAKASO NOBUTAKA
Application Number:
JP7421998A
Publication Date:
October 05, 1999
Filing Date:
March 23, 1998
Export Citation:
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Assignee:
TOPPAN PRINTING CO LTD
International Classes:
F27B5/12; (IPC1-7): F27B5/12