Title:
マイクロマシニング技術を用いた構成素子
Document Type and Number:
Japanese Patent JP2004506203
Kind Code:
A
Abstract:
A micromechanical component includes a substrate and a movable structure situated on the surface of the substrate. The movable structure is movable parallel to the surface of the substrate. The structure is surrounded by a frame having a cap attached to it. In the area of the movable element, the cap has a stop limiting the movement of the movable element in a direction perpendicular to the surface of the substrate.
Inventors:
Jürgen Kourle
Kurt Weipren
Stephan pinter
Kurt Weipren
Stephan pinter
Application Number:
JP2002517539A
Publication Date:
February 26, 2004
Filing Date:
July 21, 2001
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
B81B3/00; G01P1/02; G01P9/04; G01P15/08; G01P15/125; H01L29/84; (IPC1-7): G01P15/08; B81B3/00; G01P15/125; H01L29/84
Domestic Patent References:
| JPH07159432A | 1995-06-23 | |||
| JPH09178770A | 1997-07-11 | |||
| JP2001160626A | 2001-06-12 | |||
| JPH0772169A | 1995-03-17 | |||
| JPH07280832A | 1995-10-27 | |||
| JP2000187041A | 2000-07-04 | |||
| JPH08233851A | 1996-09-13 | |||
| JPH08320340A | 1996-12-03 |
Attorney, Agent or Firm:
Toshio Yano
Einzel Felix-Reinhard
Reinhard Einsel
Einzel Felix-Reinhard
Reinhard Einsel