Title:
COMPOSITE APPARATUS OF FIB AND PROBE HAVING FUNCTION OF PROCESSING PROBE HEAD
Document Type and Number:
Japanese Patent JP2005300442
Kind Code:
A
Abstract:
To provide a composite apparatus which is an integral system of a probe microscope and a charged particle beam device, such as an FIB or the like, and has a means, capable of easily and stably processing a probe head section being worn or damaged, by using own charged particle beam device.
In the composite apparatus, provided with by combining the charged particle beam device and a probing device, a probe-driving device 3 and a cantilever 2 having a tip 1 at the head of the probing device are arranged on a mechanism which is freely movable along a straight line and rotatable.
Inventors:
ADACHI TATSUYA
SUGIYAMA YASUHIKO
SUGIYAMA YASUHIKO
Application Number:
JP2004119871A
Publication Date:
October 27, 2005
Filing Date:
April 15, 2004
Export Citation:
Assignee:
SII NANOTECHNOLOGY INC
International Classes:
G01Q30/02; G01Q40/00; G01Q60/16; G01Q60/38; G01Q80/00; G03F1/72; G03F7/20; G21K5/00; G21K5/04; H01J37/30; H01J37/317; H01L21/027; (IPC1-7): G01N13/10; G01N13/12; G01N13/16; G03F1/08; G03F7/20; G21K5/00; G21K5/04; H01J37/30; H01J37/317; H01L21/027
Attorney, Agent or Firm:
Yoshiharu Matsushita