Title:
複合単結晶薄膜
Document Type and Number:
Japanese Patent JP7124088
Kind Code:
B2
Abstract:
The present disclosure provides a composite monocrystalline film, which may comprise the following seven layers: a substrate(110); a first transition layer(115) disposed on the substrate; a first isolation layer(120) disposed on the first transition layer; a second transition layer(125) disposed on the first isolation layer; a first film layer(130) disposed on the second transition layer; a third transition layer(135) disposed on the first film layer; and a second film layer(140) disposed on the third transition layer, wherein the first transition layer, second transition layer, and third transition layer may include H and Ar.
Inventors:
Ju Hobin
Lee Zhengyu
Fu Wen
Hu Hui
Lee Yangyang
Lee Zhengyu
Fu Wen
Hu Hui
Lee Yangyang
Application Number:
JP2020534967A
Publication Date:
August 23, 2022
Filing Date:
June 21, 2018
Export Citation:
Assignee:
Jinan Jinjeong Electronics Company Limited
International Classes:
G02B6/12; B32B18/00; G02B6/132; G02F1/01
Domestic Patent References:
| JP2009021573A | ||||
| JP2017028247A | ||||
| JP2009272619A | ||||
| JP2017139720A | ||||
| JP3187231U | ||||
| JP9315811A |
Foreign References:
| CN105321806A | ||||
| CN1385906A | ||||
| WO2014192873A1 | ||||
| WO2014077212A1 |
Attorney, Agent or Firm:
Cleo International Law & Patent Office