Title:
COMPOSITE THIN FILM SENSOR MODULE
Document Type and Number:
Japanese Patent JP2510962
Kind Code:
B2
Abstract:
PURPOSE: To accurately detect the object to be measured even when an atmospheric temperature sensor, a humidity sensor, an air flow sensor, a radiation sensor, etc., are integrally formed.
CONSTITUTION: At least a radiation sensor 22, an atmospheric temperature sensor 20 and a humidity sensor 30 are provided on a board 10. A cover plate 32 is so mounted at a specified interval from the board 10 as to cover the board 10, and an opening 34 is formed only above the sensors of the plate 32. A side between the plate 32 and the board 10 is formed with an opening 35 in which an air flow can pass.
Inventors:
FUJITA KATSUHISA
MURAKAWA SHINICHI
EGASHIRA YOSHIO
YOKOYAMA MITSURU
MATSUDA MINORU
ISHAMA ICHIRO
KATO MASAKI
NISHIDA TATSUYA
MURAKAWA SHINICHI
EGASHIRA YOSHIO
YOKOYAMA MITSURU
MATSUDA MINORU
ISHAMA ICHIRO
KATO MASAKI
NISHIDA TATSUYA
Application Number:
JP29372392A
Publication Date:
June 26, 1996
Filing Date:
October 06, 1992
Export Citation:
Assignee:
MITSUBISHI JUKOGYO KK
HOKURIKU DENKI KOGYO KK
HOKURIKU DENKI KOGYO KK
International Classes:
F24F11/02; G01D21/02; G01K7/16; G01N25/64; (IPC1-7): F24F11/02; G01D21/02; G01K7/16; G01N25/64
Domestic Patent References:
| JP3262923A |
Attorney, Agent or Firm:
Hirosawa Isao